HRBS V500 2Å 超薄膜膜厚測定、組成分析

Vertical Type High Resolution RBS System
For elemental quantitative analysis﹐ film thickness measurement and crystallinity assessment of semiconductor and magnetic thin films.

Features:
• Vertical Type! Compact-in-class!
Installation area is reduced by a large margin! (2/3)
Function of hardware and software is upgraded and user-friendly.
• Scattering angle is changeable easily all the time! (Option)
Scattering angle can be selected and adjusted without venting vacuum chamber.
Easy operation corresponding to fine adjustment of scattering angle.
• Hydrogen measurement with high resolution! (Option)
Hydrogen can be also analyzed with high resolution of 2.8 Å that was impossible to achieve by conventional ERDA.
• Also useful for strain measurement of crystalline!
Strain and crystallinity can be quantitative assessed with high resolution using channeling.

Applications:
• HRBS Spectrum and Depth profile of High-k (HfOx) film
• Strain measurement of Si crystalline between High-k film and Si substrate
• HRBS Spectrum and simulation of MRAM (multi-layer)
• Depth profile of MRAM (multi-layer)